DC Field | Value | Language |
---|---|---|
dc.contributor.author | Cho, Byung Jin | - |
dc.contributor.author | Ko, LH | - |
dc.contributor.author | Nga, YA | - |
dc.contributor.author | Chan, LH | - |
dc.date.accessioned | 2013-03-15T12:30:58Z | - |
dc.date.available | 2013-03-15T12:30:58Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1998-11-30 | - |
dc.identifier.citation | Abstract Proc. of the Asia-Pacific SIA'98 Conf., v., no., pp.0 - 0 | - |
dc.identifier.uri | http://hdl.handle.net/10203/119480 | - |
dc.language | ENG | - |
dc.title | Investigation of the gate oxide integrity of the nitrided gate oxide using nitrogen implantation into polysilicon gate | - |
dc.title.alternative | Investigation of the gate oxide integrity of the nitrided gate oxide using nitrogen implantation into polysilicon gate | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 0 | - |
dc.citation.endingpage | 0 | - |
dc.citation.publicationname | Abstract Proc. of the Asia-Pacific SIA'98 Conf. | - |
dc.identifier.conferencecountry | Singapore | - |
dc.identifier.conferencecountry | Singapore | - |
dc.contributor.localauthor | Cho, Byung Jin | - |
dc.contributor.nonIdAuthor | Ko, LH | - |
dc.contributor.nonIdAuthor | Nga, YA | - |
dc.contributor.nonIdAuthor | Chan, LH | - |
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