Development of a Combined Optical and X-ray Interferometer (COXI) system for nanometrology

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dc.contributor.authorYim N.B.-
dc.contributor.authorKim M.S.-
dc.contributor.authorEom C.I.-
dc.date.accessioned2013-03-15T12:26:37Z-
dc.date.available2013-03-15T12:26:37Z-
dc.date.created2012-02-06-
dc.date.issued1998-07-22-
dc.identifier.citationLaser Interferometry IX: Applications, v.3479, no., pp.94 - 101-
dc.identifier.urihttp://hdl.handle.net/10203/119452-
dc.languageENG-
dc.titleDevelopment of a Combined Optical and X-ray Interferometer (COXI) system for nanometrology-
dc.typeConference-
dc.identifier.scopusid2-s2.0-57649134430-
dc.type.rimsCONF-
dc.citation.volume3479-
dc.citation.beginningpage94-
dc.citation.endingpage101-
dc.citation.publicationnameLaser Interferometry IX: Applications-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorYim N.B.-
dc.contributor.nonIdAuthorKim M.S.-
dc.contributor.nonIdAuthorEom C.I.-
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