DC Field | Value | Language |
---|---|---|
dc.contributor.author | Yim N.B. | - |
dc.contributor.author | Kim M.S. | - |
dc.contributor.author | Eom C.I. | - |
dc.date.accessioned | 2013-03-15T12:26:37Z | - |
dc.date.available | 2013-03-15T12:26:37Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1998-07-22 | - |
dc.identifier.citation | Laser Interferometry IX: Applications, v.3479, no., pp.94 - 101 | - |
dc.identifier.uri | http://hdl.handle.net/10203/119452 | - |
dc.language | ENG | - |
dc.title | Development of a Combined Optical and X-ray Interferometer (COXI) system for nanometrology | - |
dc.type | Conference | - |
dc.identifier.scopusid | 2-s2.0-57649134430 | - |
dc.type.rims | CONF | - |
dc.citation.volume | 3479 | - |
dc.citation.beginningpage | 94 | - |
dc.citation.endingpage | 101 | - |
dc.citation.publicationname | Laser Interferometry IX: Applications | - |
dc.identifier.conferencecountry | United States | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Yim N.B. | - |
dc.contributor.nonIdAuthor | Kim M.S. | - |
dc.contributor.nonIdAuthor | Eom C.I. | - |
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