Sidewall-sealed double LOCOS isolation structure with defect-free isolation recessSidewall-sealed double LOCOS isolation structure with defect-free isolation recess
- Issue Date
- 1996-03-28
- Language
- ENG
- Citation
43rd Spring Meeting of the Japan Society of Applied Physics and Related Societies, pp.730 - 730
- Appears in Collection
- EE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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