Sidewall-sealed double LOCOS isolation structure with defect-free isolation recessSidewall-sealed double LOCOS isolation structure with defect-free isolation recess

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Issue Date
1996-03-28
Language
ENG
Citation

43rd Spring Meeting of the Japan Society of Applied Physics and Related Societies, pp.730 - 730

URI
http://hdl.handle.net/10203/119438
Appears in Collection
EE-Conference Papers(학술회의논문)
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