Formation of ultra-shallow junction by point defect engineeringFormation of ultra-shallow junction by point defect engineering
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Cho, Byung Jin | - |
| dc.contributor.author | Lee, KH | - |
| dc.contributor.author | Sohn, YS | - |
| dc.contributor.author | Oh, JG | - |
| dc.contributor.author | Kim, JC | - |
| dc.date.accessioned | 2013-03-15T12:23:59Z | - |
| dc.date.available | 2013-03-15T12:23:59Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1996-04-05 | - |
| dc.identifier.citation | Ion Implantation Conf., v., no., pp.0 - 0 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/119437 | - |
| dc.language | ENG | - |
| dc.title | Formation of ultra-shallow junction by point defect engineering | - |
| dc.title.alternative | Formation of ultra-shallow junction by point defect engineering | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 0 | - |
| dc.citation.endingpage | 0 | - |
| dc.citation.publicationname | Ion Implantation Conf. | - |
| dc.identifier.conferencecountry | United States | - |
| dc.identifier.conferencecountry | United States | - |
| dc.contributor.localauthor | Cho, Byung Jin | - |
| dc.contributor.nonIdAuthor | Lee, KH | - |
| dc.contributor.nonIdAuthor | Sohn, YS | - |
| dc.contributor.nonIdAuthor | Oh, JG | - |
| dc.contributor.nonIdAuthor | Kim, JC | - |
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