The Novel Water Developable Photoresist for Deep UV Lithography
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jung, Min Ho | - |
| dc.contributor.author | Kim, Jin-Baek | - |
| dc.date.accessioned | 2013-03-15T12:14:51Z | - |
| dc.date.available | 2013-03-15T12:14:51Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1996-04 | - |
| dc.identifier.citation | 한국고분자학회 1996년도 춘계 학술대회 , v., no., pp.196 - 197 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/119382 | - |
| dc.language | ENG | - |
| dc.publisher | 한국고분자학회 | - |
| dc.title | The Novel Water Developable Photoresist for Deep UV Lithography | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 196 | - |
| dc.citation.endingpage | 197 | - |
| dc.citation.publicationname | 한국고분자학회 1996년도 춘계 학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Kim, Jin-Baek | - |
| dc.contributor.nonIdAuthor | Jung, Min Ho | - |
- Appears in Collection
- CH-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.