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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Linewidth Measurement of Wafers using SEM and its Uncertainty Evaluation

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dc.contributor.authorKim, Seung-Woo-
dc.contributor.authorKo, YU-
dc.contributor.authorEom, TB-
dc.contributor.authorKim, KH-
dc.date.accessioned2013-03-15T12:04:27Z-
dc.date.available2013-03-15T12:04:27Z-
dc.date.created2012-02-06-
dc.date.issued1996-
dc.identifier.citationSPIE , v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/119304-
dc.languageENG-
dc.titleLinewidth Measurement of Wafers using SEM and its Uncertainty Evaluation-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameSPIE-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorKim, Seung-Woo-
dc.contributor.nonIdAuthorKo, YU-
dc.contributor.nonIdAuthorEom, TB-
dc.contributor.nonIdAuthorKim, KH-
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ME-Conference Papers(학술회의논문)
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