Dielectric characteristics of ECR-PECVD Ta2O5 thin films on various substrates

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Issue Date
1995-01-01
Language
ENG
Citation

Proceedings of the IUMRS (International Union of Materials Research Society) 1994 International Conf, pp.321 - 326

URI
http://hdl.handle.net/10203/119245
Appears in Collection
MS-Conference Papers(학술회의논문)
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