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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Tunable micromirror switches using (110) silicon wafer

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Seo Kyoung-Sun / Cho, Young-Horesearcher / Youn, Sung-Kieresearcher
Publisher
International Symposium on Micro Machine and Human Science
Issue Date
1996-10-02
Language
English
Citation

Proceedings of the 1996 7th International Symposium on Micro Machine and Human Science, pp.73 - 77

URI
http://hdl.handle.net/10203/119176
Appears in Collection
BiS-Conference Papers(학술회의논문)ME-Conference Papers(학술회의논문)
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