Preparation of aluminum nitride films by ECR PECVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, Won-Jong | - |
| dc.date.accessioned | 2013-03-15T11:36:42Z | - |
| dc.date.available | 2013-03-15T11:36:42Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1995-01-01 | - |
| dc.identifier.citation | Proceedings of the IUMRS (International Union of Materials Research Society) 1994 International Conf, v., no., pp.147 - 151 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/119148 | - |
| dc.language | ENG | - |
| dc.title | Preparation of aluminum nitride films by ECR PECVD | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 147 | - |
| dc.citation.endingpage | 151 | - |
| dc.citation.publicationname | Proceedings of the IUMRS (International Union of Materials Research Society) 1994 International Conf | - |
| dc.contributor.localauthor | Lee, Won-Jong | - |
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