Silicon Wafer Transport System Based on Magnetic Levitation
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Soo Hyun Kim | - |
| dc.date.accessioned | 2013-03-15T11:34:48Z | - |
| dc.date.available | 2013-03-15T11:34:48Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1995-01-01 | - |
| dc.identifier.citation | KACC, v., no., pp.705 - 708 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/119137 | - |
| dc.language | KOR | - |
| dc.title | Silicon Wafer Transport System Based on Magnetic Levitation | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 705 | - |
| dc.citation.endingpage | 708 | - |
| dc.citation.publicationname | KACC | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Soo Hyun Kim | - |
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- ME-Conference Papers(학술회의논문)
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