DC Field | Value | Language |
---|---|---|
dc.contributor.author | 장충석 | - |
dc.date.accessioned | 2013-03-15T11:27:45Z | - |
dc.date.available | 2013-03-15T11:27:45Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1995 | - |
dc.identifier.citation | Bull. Kor. Phy. Soc., v., no., pp.204 - 204 | - |
dc.identifier.uri | http://hdl.handle.net/10203/119083 | - |
dc.language | KOR | - |
dc.title | Plasma-Assisted Etching 에서 식각 패턴 형성에 관한 연구 | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 204 | - |
dc.citation.endingpage | 204 | - |
dc.citation.publicationname | Bull. Kor. Phy. Soc. | - |
dc.identifier.conferencecountry | South Korea | - |
dc.identifier.conferencecountry | South Korea | - |
dc.contributor.localauthor | 장충석 | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.