DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kwak, Byung Man | - |
dc.date.accessioned | 2013-03-15T10:55:16Z | - |
dc.date.available | 2013-03-15T10:55:16Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1998-11-01 | - |
dc.identifier.citation | Symposium on Micromechanical Systems, IMECE'98, v., no., pp.353 - 356 | - |
dc.identifier.uri | http://hdl.handle.net/10203/118815 | - |
dc.language | ENG | - |
dc.title | Design and Fabrication of Cantilever Microaccelerometer Arrays witha Symmetrically Bonded Proof-mass | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 353 | - |
dc.citation.endingpage | 356 | - |
dc.citation.publicationname | Symposium on Micromechanical Systems, IMECE'98 | - |
dc.contributor.localauthor | Kwak, Byung Man | - |
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