Batching and Input Regulation in the Photolithography Process for Memory Chips Fabrication메모리칩 제조 포토공정의 뱃칭 및 투입정책
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Shin, Y. | - |
| dc.contributor.author | Lee, Tae-Eog | - |
| dc.contributor.author | Lee, Y. | - |
| dc.date.accessioned | 2013-03-15T09:41:40Z | - |
| dc.date.available | 2013-03-15T09:41:40Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1995-04 | - |
| dc.identifier.citation | 한국경영과학회 1995년도 춘계공동학술대회, v., no., pp.750 - 750 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/118350 | - |
| dc.language | KOR | - |
| dc.publisher | 한국경영과학회 | - |
| dc.title | Batching and Input Regulation in the Photolithography Process for Memory Chips Fabrication | - |
| dc.title.alternative | 메모리칩 제조 포토공정의 뱃칭 및 투입정책 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 750 | - |
| dc.citation.endingpage | 750 | - |
| dc.citation.publicationname | 한국경영과학회 1995년도 춘계공동학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Lee, Tae-Eog | - |
| dc.contributor.nonIdAuthor | Shin, Y. | - |
| dc.contributor.nonIdAuthor | Lee, Y. | - |
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