DC Field | Value | Language |
---|---|---|
dc.contributor.author | Bae, Byeong-Soo | - |
dc.contributor.author | No, Kwangsoo | - |
dc.contributor.author | Hong, S | - |
dc.contributor.author | Kim, E | - |
dc.contributor.author | Jiang, ZT | - |
dc.contributor.author | Woo, SG | - |
dc.contributor.author | Koh,YB | - |
dc.date.accessioned | 2013-03-15T09:40:12Z | - |
dc.date.available | 2013-03-15T09:40:12Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1996-01-01 | - |
dc.identifier.citation | , v., no., pp.134 - 137 | - |
dc.identifier.uri | http://hdl.handle.net/10203/118339 | - |
dc.language | ENG | - |
dc.title | Investigation on Applicability of Chromium-based Materials to Attenuated Phase Shift Mask for DUV Exposure | - |
dc.title.alternative | Investigation on Applicability of Chromium-based Materials to Attenuated Phase Shift Mask for DUV Exposure | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 134 | - |
dc.citation.endingpage | 137 | - |
dc.contributor.localauthor | Bae, Byeong-Soo | - |
dc.contributor.localauthor | No, Kwangsoo | - |
dc.contributor.nonIdAuthor | Hong, S | - |
dc.contributor.nonIdAuthor | Kim, E | - |
dc.contributor.nonIdAuthor | Jiang, ZT | - |
dc.contributor.nonIdAuthor | Woo, SG | - |
dc.contributor.nonIdAuthor | Koh,YB | - |
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