Frequency tuning of a laterally driven microresonator using an electrostatic comb array of linearly varied length

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 279
  • Download : 0
Issue Date
1997-06-16
Language
ENG
Citation

Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2), v.1, pp.113 - 116

URI
http://hdl.handle.net/10203/118283
Appears in Collection
BiS-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0