Preparation of PZT thin films on Pt/Ti/SiO2 and Pt/SiO2 substrates by ECR plasma enhanced DC magnetron multi-target reactive sputtering

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 222
  • Download : 0
Issue Date
1996-12-02
Language
ENG
Citation

Proceedings of the 1996 MRS Fall Meeting, v.441, pp.205 - 210

ISSN
0272-9172
URI
http://hdl.handle.net/10203/118083
Appears in Collection
MS-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0