Preparation of PZT thin films on Pt/Ti/SiO2 and Pt/SiO2 substrates by ECR plasma enhanced DC magnetron multi-target reactive sputtering
- Issue Date
- 1996-12-02
- Language
- ENG
- Citation
Proceedings of the 1996 MRS Fall Meeting, v.441, pp.205 - 210
- ISSN
- 0272-9172
- Appears in Collection
- MS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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