Platinum Bottom Electrode Formed by Electron Beam Evaporation for High Dielectric Thin Films
- Issue Date
- 1995-01-01
- Language
- ENG
- Citation
12th Conf. on Ferro. Mat. and Their Appl. 1995, pp.93 - 95
- Appears in Collection
- MS-Conference Papers(학술회의논문)EE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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