Platinum Bottom Electrode Formed by Electron Beam Evaporation for High Dielectric Thin Films

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Issue Date
1995-01-01
Language
ENG
Citation

12th Conf. on Ferro. Mat. and Their Appl. 1995, pp.93 - 95

URI
http://hdl.handle.net/10203/117986
Appears in Collection
MS-Conference Papers(학술회의논문)EE-Conference Papers(학술회의논문)
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