Formation of Arbitrary Shaped Hole in Silicon Substrate
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Choong Ki | - |
| dc.contributor.author | Chul-Hi Han | - |
| dc.date.accessioned | 2013-03-15T08:41:28Z | - |
| dc.date.available | 2013-03-15T08:41:28Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1995 | - |
| dc.identifier.citation | International society of electrochemistry, v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/117943 | - |
| dc.language | ENG | - |
| dc.title | Formation of Arbitrary Shaped Hole in Silicon Substrate | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | International society of electrochemistry | - |
| dc.identifier.conferencecountry | China | - |
| dc.identifier.conferencecountry | China | - |
| dc.contributor.localauthor | Kim, Choong Ki | - |
| dc.contributor.localauthor | Chul-Hi Han | - |
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