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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Thermo-Mechanical Stresses in Laminated Polymer Films on Silicon Substrates

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dc.contributor.authorPaik, KW-
dc.contributor.authorKim, JS-
dc.contributor.authorOh, SH-
dc.contributor.authorSeo, HS-
dc.date.accessioned2013-03-15T08:35:56Z-
dc.date.available2013-03-15T08:35:56Z-
dc.date.created2012-02-06-
dc.date.issued1998-02-01-
dc.identifier.citation제5회 한국반도체 학술대회, v., no., pp.587 - 588-
dc.identifier.urihttp://hdl.handle.net/10203/117911-
dc.languageKOR-
dc.publisher한국반도체 학술대회-
dc.titleThermo-Mechanical Stresses in Laminated Polymer Films on Silicon Substrates-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage587-
dc.citation.endingpage588-
dc.citation.publicationname제5회 한국반도체 학술대회-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthorPaik, KW-
dc.contributor.nonIdAuthorKim, JS-
dc.contributor.nonIdAuthorOh, SH-
dc.contributor.nonIdAuthorSeo, HS-
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MS-Conference Papers(학술회의논문)
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