Thermo-Mechanical Stresses in Laminated Polymer Films on Silicon Substrates

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Publisher
한국반도체 학술대회
Issue Date
1998-02-01
Language
KOR
Citation

제5회 한국반도체 학술대회, pp.587 - 588

URI
http://hdl.handle.net/10203/117911
Appears in Collection
MS-Conference Papers(학술회의논문)
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