High Performance Electroplated Solenoid-Type Integrated Inductor(SI2) for RF Applications Using Simple 3D Surface Micromachining Technology

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Issue Date
1998
Language
ENG
Citation

International Electron Devices Meeting, pp.544 - 547

URI
http://hdl.handle.net/10203/117885
Appears in Collection
EE-Conference Papers(학술회의논문)
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