Electron cyclotron resonance N2O plasma thermal oxide and its application to polysilicon thin film transistors

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dc.contributor.author한철희-
dc.date.accessioned2013-03-15T08:18:11Z-
dc.date.available2013-03-15T08:18:11Z-
dc.date.created2012-02-06-
dc.date.issued1997-
dc.identifier.citation통신/전자 학술대회, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/117752-
dc.languageKOR-
dc.titleElectron cyclotron resonance N2O plasma thermal oxide and its application to polysilicon thin film transistors-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationname통신/전자 학술대회-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthor한철희-
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