Electron cyclotron resonance N2O plasma thermal oxide and its application to polysilicon thin film transistors
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 한철희 | - |
| dc.date.accessioned | 2013-03-15T08:18:11Z | - |
| dc.date.available | 2013-03-15T08:18:11Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1997 | - |
| dc.identifier.citation | 통신/전자 학술대회, v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/117752 | - |
| dc.language | KOR | - |
| dc.title | Electron cyclotron resonance N2O plasma thermal oxide and its application to polysilicon thin film transistors | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 통신/전자 학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 한철희 | - |
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