PED-Stabilized Chemically Amplified Resists Containing Basic Units in the Matrix Polymers

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Publisher
한국고분자학회
Issue Date
1998-04-10
Language
ENG
Citation

한국고분자학회 1998년도 춘계 학술대회, v.23, no.1, pp.114 - 115

URI
http://hdl.handle.net/10203/117747
Appears in Collection
CH-Conference Papers(학술회의논문)
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