In situ stress measurements of Co-based multilayer films

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dc.contributor.authorKim, YS-
dc.contributor.authorShin, Sung-Chul-
dc.date.accessioned2013-03-15T08:04:28Z-
dc.date.available2013-03-15T08:04:28Z-
dc.date.created2012-02-06-
dc.date.issued1995-04-17-
dc.identifier.citation1995 MRS Spring Meeting, v.382, no., pp.285 - 290-
dc.identifier.issn0272-9172-
dc.identifier.urihttp://hdl.handle.net/10203/117651-
dc.languageENG-
dc.publisherMRS-
dc.titleIn situ stress measurements of Co-based multilayer films-
dc.typeConference-
dc.identifier.scopusid2-s2.0-0029533836-
dc.type.rimsCONF-
dc.citation.volume382-
dc.citation.beginningpage285-
dc.citation.endingpage290-
dc.citation.publicationname1995 MRS Spring Meeting-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorShin, Sung-Chul-
dc.contributor.nonIdAuthorKim, YS-
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PH-Conference Papers(학술회의논문)
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