Influence of substrate misorientation on facet formation in selective area metalorganic chemical vapor deposition

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Issue Date
1996-12-02
Language
ENG
Citation

Proceedings of the 1996 MRS Fall Meeting, v.441, pp.163 - 168

ISSN
0272-9172
URI
http://hdl.handle.net/10203/117616
Appears in Collection
EE-Conference Papers(학술회의논문)
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