A Surface-micromachined Tunable Microgyroscope

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Issue Date
1996
Language
ENG
Citation

Proceedings of the IEEE 5th International Conference on Emerging Technologies and Factory Automation, v.2, pp.498 - 502

URI
http://hdl.handle.net/10203/117409
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EE-Conference Papers(학술회의논문)BiS-Conference Papers(학술회의논문)ME-Conference Papers(학술회의논문)
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