DSpace at KOASAS
College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Single-Layer Halftone Phase-Shifting Masks for DUV Microlithography : Optical Property Lation and Chromium Compound Film Preparation

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 548
  • Download : 0
Export
DC FieldValueLanguage
dc.contributor.authorNo, Kwangsoo-
dc.contributor.authorBae, Byeong-Soo-
dc.contributor.authorJiang, ZT-
dc.contributor.authorSong, S-
dc.contributor.authorKim, E-
dc.contributor.authorBae, BS-
dc.contributor.authorLim, SC-
dc.contributor.authorWoo, SG-
dc.contributor.authorKoh, YB-
dc.date.accessioned2013-03-15T07:15:53Z-
dc.date.available2013-03-15T07:15:53Z-
dc.date.created2012-02-06-
dc.date.issued1996-01-01-
dc.identifier.citationEighth International Conference on Solid Films and Surfaces, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/117268-
dc.languageENG-
dc.titleSingle-Layer Halftone Phase-Shifting Masks for DUV Microlithography : Optical Property Lation and Chromium Compound Film Preparation-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameEighth International Conference on Solid Films and Surfaces-
dc.identifier.conferencecountryJapan-
dc.identifier.conferencecountryJapan-
dc.contributor.localauthorNo, Kwangsoo-
dc.contributor.localauthorBae, Byeong-Soo-
dc.contributor.nonIdAuthorJiang, ZT-
dc.contributor.nonIdAuthorSong, S-
dc.contributor.nonIdAuthorKim, E-
dc.contributor.nonIdAuthorBae, BS-
dc.contributor.nonIdAuthorLim, SC-
dc.contributor.nonIdAuthorWoo, SG-
dc.contributor.nonIdAuthorKoh, YB-
Appears in Collection
MS-Conference Papers(학술회의논문)MS-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

Display Simple Item Record

qr_code

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.


rss_1.0 rss_2.0 atom_1.0