DC Field | Value | Language |
---|---|---|
dc.contributor.author | No, Kwangsoo | - |
dc.contributor.author | Bae, Byeong-Soo | - |
dc.contributor.author | Jiang, ZT | - |
dc.contributor.author | Song, S | - |
dc.contributor.author | Kim, E | - |
dc.contributor.author | Bae, BS | - |
dc.contributor.author | Lim, SC | - |
dc.contributor.author | Woo, SG | - |
dc.contributor.author | Koh, YB | - |
dc.date.accessioned | 2013-03-15T07:15:53Z | - |
dc.date.available | 2013-03-15T07:15:53Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1996-01-01 | - |
dc.identifier.citation | Eighth International Conference on Solid Films and Surfaces, v., no., pp. - | - |
dc.identifier.uri | http://hdl.handle.net/10203/117268 | - |
dc.language | ENG | - |
dc.title | Single-Layer Halftone Phase-Shifting Masks for DUV Microlithography : Optical Property Lation and Chromium Compound Film Preparation | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | Eighth International Conference on Solid Films and Surfaces | - |
dc.identifier.conferencecountry | Japan | - |
dc.identifier.conferencecountry | Japan | - |
dc.contributor.localauthor | No, Kwangsoo | - |
dc.contributor.localauthor | Bae, Byeong-Soo | - |
dc.contributor.nonIdAuthor | Jiang, ZT | - |
dc.contributor.nonIdAuthor | Song, S | - |
dc.contributor.nonIdAuthor | Kim, E | - |
dc.contributor.nonIdAuthor | Bae, BS | - |
dc.contributor.nonIdAuthor | Lim, SC | - |
dc.contributor.nonIdAuthor | Woo, SG | - |
dc.contributor.nonIdAuthor | Koh, YB | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.