DSpace at KOASAS: Short channel effects in n-and p-channel polysilicon TFT's with very thin ECRN2O-plasma gate dielectric

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Short channel effects in n-and p-channel polysilicon TFT's with very thin ECRN2O-plasma gate dielectric

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한철희 researcher

Issue Date: 1997

Language: KOR

Citation: 한국 정보디스플레이 학술대회

URI: http://hdl.handle.net/10203/116909

Appears in Collection: RIMS Conference Papers

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Short channel effects in n-and p-channel polysilicon TFT's with very thin ECRN2O-plasma gate dielectric

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