Fault-Tolernat Supervisory for Plasms Etching Systems using EPD signal
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lim Jong-Tae | - |
| dc.contributor.author | Park, SJ | - |
| dc.date.accessioned | 2013-03-15T05:58:34Z | - |
| dc.date.available | 2013-03-15T05:58:34Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998 | - |
| dc.identifier.citation | 제어계측, 로보틱스 및 자동화 연구회 합동 학술 발표회 , v., no., pp.84 - 87 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/116833 | - |
| dc.language | KOR | - |
| dc.title | Fault-Tolernat Supervisory for Plasms Etching Systems using EPD signal | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 84 | - |
| dc.citation.endingpage | 87 | - |
| dc.citation.publicationname | 제어계측, 로보틱스 및 자동화 연구회 합동 학술 발표회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Lim Jong-Tae | - |
| dc.contributor.nonIdAuthor | Park, SJ | - |
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