Fluorinated Silicon Nitride 박막의 조성과 광학성질
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 노광수 | - |
| dc.contributor.author | 배병수 | - |
| dc.contributor.author | 전병혁 | - |
| dc.contributor.author | 이준성 | - |
| dc.contributor.author | 김대원 | - |
| dc.contributor.author | 성태현 | - |
| dc.date.accessioned | 2013-03-15T05:38:13Z | - |
| dc.date.available | 2013-03-15T05:38:13Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1997-01-01 | - |
| dc.identifier.citation | 한국요업학회 추계학술발표대회, v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/116729 | - |
| dc.language | KOR | - |
| dc.publisher | 한국요업학회 | - |
| dc.title | Fluorinated Silicon Nitride 박막의 조성과 광학성질 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 한국요업학회 추계학술발표대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 노광수 | - |
| dc.contributor.localauthor | 배병수 | - |
| dc.contributor.nonIdAuthor | 전병혁 | - |
| dc.contributor.nonIdAuthor | 이준성 | - |
| dc.contributor.nonIdAuthor | 김대원 | - |
| dc.contributor.nonIdAuthor | 성태현 | - |
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