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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Control Strategy of Fine Manipulator with Compliance For Wafer Probing System Based on Magnetic Levitation

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Choi, K.B. / Kim, Soohyunresearcher / Kwak,Y. K.
Publisher
MV2
Issue Date
1997-05
Language
English
Citation

2nd Int. Conf. MV2 on Active Cont. in Mechanical Eng

URI
http://hdl.handle.net/10203/116700
Appears in Collection
ME-Conference Papers(학술회의논문)
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