Control Strategy of Fine Manipulator with Compliance For Wafer Probing System Based on Magnetic Levitation

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dc.contributor.authorChoi, K.B.-
dc.contributor.authorKim, Soohyun-
dc.contributor.authorKwak,Y. K.-
dc.date.accessioned2013-03-15T05:31:25Z-
dc.date.available2013-03-15T05:31:25Z-
dc.date.created2012-02-06-
dc.date.issued1997-
dc.identifier.citation2nd Int. Conf. MV2 on Active Cont. in Mechanical Eng, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/116700-
dc.languageENG-
dc.titleControl Strategy of Fine Manipulator with Compliance For Wafer Probing System Based on Magnetic Levitation-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationname2nd Int. Conf. MV2 on Active Cont. in Mechanical Eng-
dc.identifier.conferencecountryFrance-
dc.identifier.conferencecountryFrance-
dc.contributor.localauthorKim, Soohyun-
dc.contributor.nonIdAuthorChoi, K.B.-
dc.contributor.nonIdAuthorKwak,Y. K.-
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ME-Conference Papers(학술회의논문)
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