DSpace at KOASAS
College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Control of Stress Profile Two-step Phosporus Dopping in Sueface Micromachined Polysilicon Structure

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 488
  • Download : 0
Export
DC FieldValueLanguage
dc.contributor.authorNo, Kwangsoo-
dc.contributor.authorLee, CS-
dc.contributor.authorChung, HH-
dc.contributor.authorBaek, KH-
dc.contributor.authorLee, JH-
dc.contributor.authorYoo, HJ-
dc.date.accessioned2013-03-15T05:31:06Z-
dc.date.available2013-03-15T05:31:06Z-
dc.date.created2012-02-06-
dc.date.issued1996-01-01-
dc.identifier.citationISPSA, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/116699-
dc.languageENG-
dc.titleControl of Stress Profile Two-step Phosporus Dopping in Sueface Micromachined Polysilicon Structure-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameISPSA-
dc.contributor.localauthorNo, Kwangsoo-
dc.contributor.nonIdAuthorLee, CS-
dc.contributor.nonIdAuthorChung, HH-
dc.contributor.nonIdAuthorBaek, KH-
dc.contributor.nonIdAuthorLee, JH-
dc.contributor.nonIdAuthorYoo, HJ-
Appears in Collection
MS-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

Display Simple Item Record

qr_code

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.


rss_1.0 rss_2.0 atom_1.0