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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

ECR-PECVD법을 사용한 VLSI DRAM용 PZT박막제조

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노광수researcher / 김재환 / 신중식 / 김성태 / 위당문researcher / 이원종researcher
Publisher
한국진공학회
Issue Date
1995-01-01
Language
KOR
Citation

한국진공학회 추계학술발표대회

URI
http://hdl.handle.net/10203/116651
Appears in Collection
MS-Conference Papers(학술회의논문)
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