Extraction of elastic parameters of heavily boron-doped silicon layer by elimination of misfit dislocations

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Issue Date
1995-04-17
Language
ENG
Citation

Proceedings of the 1995 MRS Spring Meeting, v.378, pp.129 - 134

ISSN
0272-9172
URI
http://hdl.handle.net/10203/116640
Appears in Collection
EE-Conference Papers(학술회의논문)
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