A 2-D Modeling of a Cl2 Gas Discharge in an Inductively Coupled Plasma

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dc.contributor.author최덕인-
dc.contributor.author장충석-
dc.date.accessioned2013-03-15T05:20:26Z-
dc.date.available2013-03-15T05:20:26Z-
dc.date.created2012-02-06-
dc.date.issued1995-
dc.identifier.citation한국물리학회, v., no., pp.457 --
dc.identifier.urihttp://hdl.handle.net/10203/116638-
dc.languageKOR-
dc.titleA 2-D Modeling of a Cl2 Gas Discharge in an Inductively Coupled Plasma-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage457-
dc.citation.publicationname한국물리학회-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthor최덕인-
dc.contributor.localauthor장충석-
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PH-Conference Papers(학술회의논문)
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