A 2-D Modeling of a Cl2 Gas Discharge in an Inductively Coupled Plasma
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 최덕인 | - |
| dc.contributor.author | 장충석 | - |
| dc.date.accessioned | 2013-03-15T05:20:26Z | - |
| dc.date.available | 2013-03-15T05:20:26Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1995 | - |
| dc.identifier.citation | 한국물리학회, v., no., pp.457 - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/116638 | - |
| dc.language | KOR | - |
| dc.title | A 2-D Modeling of a Cl2 Gas Discharge in an Inductively Coupled Plasma | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 457 | - |
| dc.citation.publicationname | 한국물리학회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 최덕인 | - |
| dc.contributor.localauthor | 장충석 | - |
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