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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

양단 구속 보 스프링을 갖는 다결성 실리콘 공진기에 대한 비선형 진동 특성의 해석 및 평가Analysis and evaluation of nonlinear vibration characteristics of a polysilicon resonator with clamped-clamped beam spring

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홍윤식 / 김수현researcher / 곽윤근researcher / 이창승 / 장원익 / 최창억 / 이종현
Publisher
한국정밀공학회
Issue Date
1998
Language
KOR
Citation

한국정밀공학회 98년 춘계학술대회, pp.896 - 899

URI
http://hdl.handle.net/10203/116612
Appears in Collection
ME-Conference Papers(학술회의논문)ME-Conference Papers(학술회의논문)
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