Selective Characterization & Complete Planarization of Plug with Aluminum by Cycle Chemical Vapor Deposition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | KANG SANG WON | - |
| dc.date.accessioned | 2013-03-15T04:37:10Z | - |
| dc.date.available | 2013-03-15T04:37:10Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998-01-01 | - |
| dc.identifier.citation | The 4th International Conference on Electronic Materials Abstract Book, v., no., pp.105 - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/116417 | - |
| dc.language | KOR | - |
| dc.title | Selective Characterization & Complete Planarization of Plug with Aluminum by Cycle Chemical Vapor Deposition | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 105 | - |
| dc.citation.publicationname | The 4th International Conference on Electronic Materials Abstract Book | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | KANG SANG WON | - |
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