Multi-Axis Dual-Servo Control of an XYQ- Stage for Ultraprecision Positioning Over Long Travel

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dc.contributor.authorKim, Seung-Woo-
dc.contributor.authorLee, C.W.-
dc.contributor.authorOh, J.K.-
dc.contributor.authorLee, H.S.-
dc.date.accessioned2013-03-15T04:23:37Z-
dc.date.available2013-03-15T04:23:37Z-
dc.date.created2012-02-06-
dc.date.issued1995-
dc.identifier.citationProceedings of International Federation of Automatic Control, v., no., pp.347 - 353-
dc.identifier.urihttp://hdl.handle.net/10203/116348-
dc.languageENG-
dc.titleMulti-Axis Dual-Servo Control of an XYQ- Stage for Ultraprecision Positioning Over Long Travel-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage347-
dc.citation.endingpage353-
dc.citation.publicationnameProceedings of International Federation of Automatic Control-
dc.identifier.conferencecountryGermany-
dc.identifier.conferencecountryGermany-
dc.contributor.localauthorKim, Seung-Woo-
dc.contributor.nonIdAuthorLee, C.W.-
dc.contributor.nonIdAuthorOh, J.K.-
dc.contributor.nonIdAuthorLee, H.S.-
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ME-Conference Papers(학술회의논문)
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