Helicon 플라즈마 발생 장치의 효율적 플라즈마 발생 기작에 대한 한가지 제안

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Issue Date
1995
Language
KOR
Citation

한국물리학회, pp.435 - 435

URI
http://hdl.handle.net/10203/116266
Appears in Collection
PH-Conference Papers(학술회의논문)
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