저유전율 비정질 불화탄소박막의 증착
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 배병수 | - |
| dc.contributor.author | 한상수 | - |
| dc.contributor.author | 김태균 | - |
| dc.date.accessioned | 2013-03-15T03:56:36Z | - |
| dc.date.available | 2013-03-15T03:56:36Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998 | - |
| dc.identifier.citation | 한국요업학회 춘계학술발표대회, v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/116197 | - |
| dc.language | KOR | - |
| dc.publisher | 한국요업학회 | - |
| dc.title | 저유전율 비정질 불화탄소박막의 증착 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 한국요업학회 춘계학술발표대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 배병수 | - |
| dc.contributor.nonIdAuthor | 한상수 | - |
| dc.contributor.nonIdAuthor | 김태균 | - |
- Appears in Collection
- MS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.