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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Measurement of thermal expansion coefficient of poly-si using microgauge sensors

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Chae J.-H. / Lee J.-Y. / Kang S.-W.researcher
Issue Date
1997-12-11
Language
ENG
Citation

Smart Electronics and MEMS, v.3242, pp.202 - 211

URI
http://hdl.handle.net/10203/116142
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MS-Conference Papers(학술회의논문)
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