Low-temperature crystallization of amorphous silicon thin films by microwave heating
- Publisher
- MRS
- Issue Date
- 1997-03-31
- Language
- English
- Citation
Proceedings of the 1997 MRS Spring Meeting, pp.173 - 178
- ISSN
- 0272-9172
- Appears in Collection
- MS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.