Low-temperature crystallization of amorphous silicon thin films by microwave heating

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Issue Date
1997-03-31
Language
ENG
Citation

Proceedings of the 1997 MRS Spring Meeting, v.471, pp.173 - 178

ISSN
0272-9172
URI
http://hdl.handle.net/10203/116123
Appears in Collection
MS-Conference Papers(학술회의논문)
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