Scheduling cluster tools in wafer fabrication using candidate list and simulated annealing

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Issue Date
1998-10-11
Language
ENG
Citation

Proceedings of the 1998 IEEE International Conference on Systems, Man, and Cybernetics. Part 3 (of 5), v.3, pp.2291 - 2296

ISSN
0884-3627
URI
http://hdl.handle.net/10203/115861
Appears in Collection
ME-Conference Papers(학술회의논문)
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