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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Scheduling cluster tools in wafer fabrication using candidate list and simulated annealing

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Yim, SS / Lee, Doo Yongresearcher
Publisher
IEEE
Issue Date
1998-10-11
Language
English
Citation

Proceedings of the 1998 IEEE International Conference on Systems, Man, and Cybernetics. Part 3 (of 5), pp.2291 - 2296

ISSN
0884-3627
URI
http://hdl.handle.net/10203/115861
Appears in Collection
ME-Conference Papers(학술회의논문)
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