Effects of NH3 Carrier Gas on the Deposition and Electrical Characterics of SrTiO3 Films Grown by ECR Plasma Assisted MOCVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | No, Kwangsoo | - |
| dc.contributor.author | Lee, JS | - |
| dc.contributor.author | Song, HW | - |
| dc.contributor.author | Jun, BH | - |
| dc.contributor.author | Yu, BG | - |
| dc.date.accessioned | 2013-03-15T02:48:27Z | - |
| dc.date.available | 2013-03-15T02:48:27Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1996-01-01 | - |
| dc.identifier.citation | International Symposium on Applications of Ferroelectric Thin Films, v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/115831 | - |
| dc.language | ENG | - |
| dc.title | Effects of NH3 Carrier Gas on the Deposition and Electrical Characterics of SrTiO3 Films Grown by ECR Plasma Assisted MOCVD | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | International Symposium on Applications of Ferroelectric Thin Films | - |
| dc.contributor.localauthor | No, Kwangsoo | - |
| dc.contributor.nonIdAuthor | Lee, JS | - |
| dc.contributor.nonIdAuthor | Song, HW | - |
| dc.contributor.nonIdAuthor | Jun, BH | - |
| dc.contributor.nonIdAuthor | Yu, BG | - |
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