Effects of ECR N2O-plasma nitridation on thermal oxide characteristics
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee Jin-Woo | - |
| dc.contributor.author | Lee Jung-Yeal | - |
| dc.contributor.author | Choi Deuk-Sung | - |
| dc.contributor.author | Hur Sung-Hoi | - |
| dc.contributor.author | Kim, Choong Ki | - |
| dc.contributor.author | Han Chul-Hi | - |
| dc.date.accessioned | 2013-03-15T02:39:17Z | - |
| dc.date.available | 2013-03-15T02:39:17Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1995-04-17 | - |
| dc.identifier.citation | Proceedings of the 1995 MRS Spring Meeting, v.391, no., pp.143 - 148 | - |
| dc.identifier.issn | 0272-9172 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/115788 | - |
| dc.language | ENG | - |
| dc.title | Effects of ECR N2O-plasma nitridation on thermal oxide characteristics | - |
| dc.type | Conference | - |
| dc.identifier.scopusid | 2-s2.0-0029510527 | - |
| dc.type.rims | CONF | - |
| dc.citation.volume | 391 | - |
| dc.citation.beginningpage | 143 | - |
| dc.citation.endingpage | 148 | - |
| dc.citation.publicationname | Proceedings of the 1995 MRS Spring Meeting | - |
| dc.identifier.conferencecountry | United States | - |
| dc.identifier.conferencecountry | United States | - |
| dc.contributor.localauthor | Kim, Choong Ki | - |
| dc.contributor.localauthor | Han Chul-Hi | - |
| dc.contributor.nonIdAuthor | Lee Jin-Woo | - |
| dc.contributor.nonIdAuthor | Lee Jung-Yeal | - |
| dc.contributor.nonIdAuthor | Choi Deuk-Sung | - |
| dc.contributor.nonIdAuthor | Hur Sung-Hoi | - |
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