Characteristics of MOCVD Aluminium Films Deposited with DMEAA
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kang, Sang Won | - |
| dc.contributor.author | Ahn, Byung Tae | - |
| dc.date.accessioned | 2013-03-15T02:21:30Z | - |
| dc.date.available | 2013-03-15T02:21:30Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1995-01-01 | - |
| dc.identifier.citation | Proc. of IUMRS Int. Conf. Asia, v., no., pp.825 - 825 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/115708 | - |
| dc.language | ENG | - |
| dc.title | Characteristics of MOCVD Aluminium Films Deposited with DMEAA | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 825 | - |
| dc.citation.endingpage | 825 | - |
| dc.citation.publicationname | Proc. of IUMRS Int. Conf. Asia | - |
| dc.contributor.localauthor | Kang, Sang Won | - |
| dc.contributor.localauthor | Ahn, Byung Tae | - |
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