자기부상을 이용한 실리콘 웨이퍼 반송시스템
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안길영 | - |
| dc.contributor.author | 박기환 | - |
| dc.contributor.author | 김수현 | - |
| dc.contributor.author | 곽윤근 | - |
| dc.date.accessioned | 2013-03-15T02:16:25Z | - |
| dc.date.available | 2013-03-15T02:16:25Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1995 | - |
| dc.identifier.citation | 1995년 한국자동제어학회 학술대회, v., no., pp.705 - 708 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/115674 | - |
| dc.language | KOR | - |
| dc.publisher | 한국자동제어학회 | - |
| dc.title | 자기부상을 이용한 실리콘 웨이퍼 반송시스템 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 705 | - |
| dc.citation.endingpage | 708 | - |
| dc.citation.publicationname | 1995년 한국자동제어학회 학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 김수현 | - |
| dc.contributor.localauthor | 곽윤근 | - |
| dc.contributor.nonIdAuthor | 안길영 | - |
| dc.contributor.nonIdAuthor | 박기환 | - |
- Appears in Collection
- ME-Conference Papers(학술회의논문)ME-Conference Papers(학술회의논문)
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