부정합 전위가 제기된 Heavily Boron-doped 실리콘 Membrane의 기계적 성질

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Issue Date
1994
Language
KOR
Citation

한국반도체 대한전자공학회 학술대회 논문집, pp.399 - 400

URI
http://hdl.handle.net/10203/115242
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RIMS Conference Papers
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