The heat of hydration of cement causes the internal temperature rise at early age, particulary in massive concrete structures such as a footing of nuclear reactor building or a dam. As the result of the temperature rise and restraint of foundation, the thermal stress may induce cracks in concrete. Therefore, the prediction of the thermal stress is very important in the design and construction stages in order to control the cracks developed in massive concrete structures. And, in case of young concrete, creep effect by the temperature load is larger than That of old concrete. Thus the effect of creep must be considered for checking the cracks, serviceability, durability and leakage. This study is composed of two items. The first, it is to develop a finite element program which is capable of simulating the temperature history in mass concrete. The second, when the thermal stress of mass concrete structures considering creep is calculated by using the modified elastic modulus due to the inner temperature change. It is shown that the analytical results of this study is in comparably good agreement with JCI's analytical results.